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N-Type SIC Ingot

N-Type SIC Ingot

  • Grade Ultra-Product grade Product grade Dummy grade
    Diameter (150.2 ± 0.2) mm (150.2 ± 0.2) mm (150.2 ± 0.2) mm
    Thickness ≥10mm ≥10mm ≥10mm
    Conductivity type n-type n-type n-type
    Dopant  Nitrogen Nitrogen Nitrogen
    Resistivity 0.015 – 0.025 Ω·cm 0.015 – 0.028 Ω·cm 0.015 – 0.028 (75% area) Ω·cm
    Micropipe density ≤0.2 cm-2 ≤0.2 cm-2 ≤2 cm-2
    Surface orientation error 4° toward [11-20] ± 0.5° 4° toward [11-20] ± 0.5° 4° toward [11-20] ± 0.5°
    Primary flat orientation // [11-20] ± 5.0° // [11-20] ± 5.0° // [11-20] ± 5.0°
    Primary flat length 47.5 mm ± 2.0 mm 47.5 mm ± 2.0 mm 47.5 mm ± 2.0 mm
    BPD ≤1000 ea/cm2  ≤2000 ea/cm2  -
    TSD ≤100 ≤500 -
    Polytype areas None None ≤5% area
    Edge Cracks None ≤3,≤1mm/ea ≤5,≤3mm/ea
    Edge indents None ≤3ea ,≤1mm width and depth ≤5ea ,≤2mm width and depth

     

    Packaging: unit-ingot cassette/vacuum packaging.

     

    *Research & Dummy Grade is also available. Please consult to our sales.

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